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Field-proven in extreme gas and liquid handling situations, a number of variations of Turcon? Variseal? spring-energized seals are especially suited to the most demanding of semiconductor sealing applications, including high vacuum and corrosive environments.

Turcon? Variseal? NW 
The Turcon? case of this flange seal encompasses the energizing spring in such a way that there can be no possible contact between the spring or spring cavity and system media. It is ideal for semiconductor applications where it can successfully operate in a vacuum and is proven in fluorine gas.

Features of the Turcon? Variseal? NW seal:

• Operates in extreme temperatures from -253 °C/ -423 °F to +260 °C/ +500 °F
• Vacuum capability in air to 10-9mbar/ l/s
• Excellent wear and friction characteristics
• Compatible with virtually all media and gases including fluorine gas at high temperature
• Available in custom sizes and standard dimensions with easy retrofit of current NW elastomer seals

Turcon? Variseal? PS?
This high-performance seal has been designed with a Turcon? PTFE based sealing body and encompasses a polymeric spring. Using the system media pressure, it is engineered to energize the seal precisely at low pressures, while maintaining high-pressure sealing integrity. The Turcon? Variseal? PS? has ultra-low leach out impurities as per SEMI standard F57-0301 and minimal outgassing, making it ideal for use in semiconductor wet processing.

Features of the Turcon? Variseal? PS? seal:

• Ultra-low leach out and no outgassing
• Thermal stability from -253 °C/ -423 °F to +80 °C/ +176 °F
• Vacuum sealing 5.3 x 10-8 mbar/l/s-1 (4.7 x 10-8 psi/in3/s-1) per mm length of seal circumference
• Excellent wear and friction characteristics
• Compatible with virtually all chemicals
• Available in standard and custom seal designs

Turcon? Variseal? Ultra-Clean?
This  seal offers the ultimate in cleanliness, making it ideal for use in processing equipment where maintaining an ultra-clean system is top priority. In the unique design of Turcon? Variseal? Ultra-Clean?, the spring required to activate the seal is fully enclosed within a Turcon? case. This means metal extractables are totally excluded, an important factor in semiconductor fabrication where the minutest contamination can destroy the effectiveness of wafers.

Features of the Turcon? Variseal? Ultra-Clean? seal:

• Operates in extreme temperatures from -253 °C / -423 °F to +260 °C / +500 °F
• Withstands high pressures in excess of 100 bar / 1450 psi
• Excellent wear and friction characteristics
• Compatible with virtually all media
• Suitable for piston, rod, face rotary, reciprocating and static situations
• Easy retrofit into standard AS-568 O-Ring and Variseal? grooves